Effect of tool geometry on ultraprecision machining of soft-brittle materials: a comprehensive review

Abstract Brittle materials are widely used for producing important components in the industry of optics, optoelectronics, and semiconductors. Ultraprecision machining brittle with high surface quality integrity helps improve functional performance lifespan components. According to their hardness, can be roughly divided into hard-brittle soft-brittle. Although there have been some literature reviews ultraprecision materials, up date, very few review papers available that focus on processing soft-brittle materials. Due ‘soft’ ‘brittle’ properties, this group has unique characteristics. This paper presents a comprehensive overview recent advances Critical aspects mechanisms, such as chip formation, topography, subsurface damage different methods, including diamond turning, micro end milling, grinding, micro/nano burnishing, compared terms tool-workpiece interaction. The effects tool geometries characteristics systematically analyzed, dominating factors sorted out. Problems challenges engineering applications identified, solutions/guidelines future R&D provided.